Nanoimprint device
Various customizations and special specifications are available!
Nanoimprint is a fine patterning technology that forms micro-patterns by applying thermosetting or photocurable resin and pressing a master plate. Resin is applied to the substrate and pressed with a mold. Fine patterns are shaped by UV irradiation. 【Model Specifications Example】 Size: 620(W) × 500(D) × 1670(H) mm Weight: 150 kg Power Supply: AC100V Substrate Size: 4-inch wafer Press Method: Servo-driven Press Pressure: 0.1 kN to 10 kN (1000 kgf) Light Source: UV-LED type Release: Automatic operation ◎ For more details, please contact us or download the catalog.
- Company:エム・シー・ケー 東京 電子事業本部
- Price:Other